INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "IN-SITU PROCESS MONITORING OF PHOTORESIST USING OPTICAL SENSOR"

GENEVA, June 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/058428) for "IN-SITU PROCESS MONITORING OF PHOTORESIST USING OPTICAL SENSOR" on Dec 04, 2024. With publication no. WO/2025/122592, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LEE, Younghee (4650 Cushing Pkwy.Fremont, California 94538), ZHAO, Hongxiang (4650 Cushing Pkwy.Fremont, California 94538), ACOSTA SANDOVAL, Adrian (4650 Cushing Pkwy.Fremont, California 94538), TAN, Samantha S.H. (4650...