INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "IN-SITU CLEANING OF A VACUUM TRANSFER MODULE END EFFECTOR"

GENEVA, Oct. 28 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/020395) for "IN-SITU CLEANING OF A VACUUM TRANSFER MODULE END EFFECTOR" on Mar 18, 2025. With publication no. WO/2025/221406, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHROEDER, Todd (4650 Cushing ParkwayFremont, California 94538), PUTHENKOVILAKAM, Ragesh (4650 Cushing ParkwayFremont, California 94538), PEDERSEN, Heather (4650 Cushing ParkwayFremont, California 94538), SPIES, Kurt Augus...