INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "IN-SITU CALIBRATION OF GAS FLOWS IN SUBSTRATE PROCESSING SYSTEMS"

GENEVA, July 3 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/059112) for "IN-SITU CALIBRATION OF GAS FLOWS IN SUBSTRATE PROCESSING SYSTEMS" on Dec 09, 2024. With publication no. WO/2025/136713, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AGARWAL, Piyush (4650 Cushing ParkwayFremont, California 94538)

Abstract: A method of calibrating gas flow includes selecting a mass flow controller (MFC) to supply a gas, dividing a volume including gas lines bet...