INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "IMPROVED PLASMA UNIFORMITY USING A HIGHER FREQUENCY SIGNAL TO POWER AN INNER COIL AND A MIXED SIGNAL OF HIGHER AND LOWER FREQUENCY SIGNALS TO POWER AN OUTER COIL"

GENEVA, Feb. 12 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2024/039414) for "IMPROVED PLASMA UNIFORMITY USING A HIGHER FREQUENCY SIGNAL TO POWER AN INNER COIL AND A MIXED SIGNAL OF HIGHER AND LOWER FREQUENCY SIGNALS TO POWER AN OUTER COIL" on Jul 24, 2024. With publication no. WO/2025/029558, the details related to the patent application was published on Feb 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SHOEB, Juline (4650 Cushing ParkwayFremont, CA 94538), TALLEY, Matthew, Lowell (4650 Cushing ParkwayFremont, CA 94538), PATERS...