INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "HYBRID PLASMA CHAMBER WITH SPLIT TOP ELECTRODE TO REDUCE ION TILTING AND PLASMA NON-UNIFORMITY"

GENEVA, Dec. 24 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2025/032096) for "HYBRID PLASMA CHAMBER WITH SPLIT TOP ELECTRODE TO REDUCE ION TILTING AND PLASMA NON-UNIFORMITY" on Jun 03, 2025. With publication no. WO/2025/259474, the details related to the patent application was published on Dec 18, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SHOEB, Juline (4650 Cushing ParkwayFremont, CA 94538), PATERSON, Alexander Miller (4650 Cushing ParkwayFremont, CA 94538)

Abstract: A system for generating plasma. The system including a plasm...