INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "HIGH TEMPERATURE ESC FOR BETTER TEMPERATURE UNIFORMITY AND CONTROL"

GENEVA, Feb. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParwayFremont, CA 94538) filed a patent application (PCT/US2025/037609) for "HIGH TEMPERATURE ESC FOR BETTER TEMPERATURE UNIFORMITY AND CONTROL" on Jul 14, 2025. With publication no. WO/2026/029968, the details related to the patent application was published on Feb 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KRISHNAPPA, Sathisha (4650 Cushing ParwayFremont, CA 94538), DAS, Saurish (4650 Cushing ParwayFremont, CA 94538), CANNIFF, Justin, Charles (4650 Cushing ParwayFremont, CA 94538), WU, Benny (4650 Cushing ParwayFremont, CA 9...