INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "GAS DISTRIBUTION PLATE ASSEMBLY FOR SEMICONDUCTOR PROCESSING CHAMBER"

GENEVA, June 11 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/051651) for "GAS DISTRIBUTION PLATE ASSEMBLY FOR SEMICONDUCTOR PROCESSING CHAMBER" on Oct 16, 2024. With publication no. WO/2025/117067, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XU, Lin (c/o Lam Research Corporation4650 Cushing Parkway M/S CA-1Fremont, California 94538), LIU, Lei (c/o Lam Research Corporation4650 Cushing Parkway M/S CA-1Fremont, California 94538), DAUGHERTY, John (c/o L...