INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "GAS DISTRIBUTION ASSEMBLY FOR SEMICONDUCTOR PROCESSING CHAMBER WITH ALUMINUM NITRIDE LAYER"

GENEVA, Oct. 14 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/021040) for "GAS DISTRIBUTION ASSEMBLY FOR SEMICONDUCTOR PROCESSING CHAMBER WITH ALUMINUM NITRIDE LAYER" on Mar 22, 2025. With publication no. WO/2025/212306, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XU, Lin (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), SRINIVASAN, Satish (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, Califor...