GENEVA, June 24 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2024/055716) for "FRACTAL SHOWERHEAD FOR FLOW UNIFORMITY" on Nov 13, 2024. With publication no. WO/2025/128266, the details related to the patent application was published on Jun 19, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DORAI, Rajesh (4650 Cushing ParkwayFremont, CA 94538), BISE, Ryan (4650 Cushing ParkwayFremont, CA 94538), HOLLAND, John, P. (4650 Cushing ParkwayFremont, CA 94538)
Abstract:
A showerhead is described. The showerhead includes a gas distribution p...