INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "FILM DEPOSITION UTILIZING REACTANT IN SECONDARY PURGE GAS FLOW"

GENEVA, Aug. 12 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/013396) for "FILM DEPOSITION UTILIZING REACTANT IN SECONDARY PURGE GAS FLOW" on Jan 28, 2025. With publication no. WO/2025/165756, the details related to the patent application was published on Aug 07, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DODHIA, Aarsh Nilesh (4650 Cushing ParkwayFremont, California 94538), POOL, Jeremy Jerome (4650 Cushing ParkwayFremont, California 94538), PUTHENKOVILAKAM, Ragesh (4650 Cushing ParkwayFremont, California 94538), SCHRO...