INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ETCHING USING A CARBON-CONTAINING FILM PRECURSOR"

GENEVA, Oct. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/023411) for "ETCHING USING A CARBON-CONTAINING FILM PRECURSOR" on Apr 07, 2025. With publication no. WO/2025/217031, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): UDYAVARA, Sagar Balagangadhara (4650 Cushing ParkwayFremont, California 94538), MALIEKKAL, Vineet (4650 Cushing ParkwayFremont, California 94538), ROBERTS, Francis Sloan (4650 Cushing ParkwayFremont, California 94538), DODHIA, Aars...