INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ETCH AND DEPOSITION OF SUBSTRATE BEVEL EDGE REGION BY TUNING GAS INTRODUCTION VIA PEZ RINGS"

GENEVA, Dec. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/031102) for "ETCH AND DEPOSITION OF SUBSTRATE BEVEL EDGE REGION BY TUNING GAS INTRODUCTION VIA PEZ RINGS" on May 28, 2025. With publication no. WO/2025/250574, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LEI, Tong (4650 Cushing ParkwayFremont, California 94538), ZHOU, He Xin (4650 Cushing ParkwayFremont, California 94538), XIAO, Yun (4650 Cushing ParkwayFremont, California 94538), CHI, Yus...