INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH POLARITY SWAPPING AND/OR POLARITY BALANCING FOR WAFER BOW CONTROL AND NONUNIFORMITY IMPROVEMENT"

GENEVA, Aug. 12 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/011028) for "ELECTROSTATIC CHUCK WITH POLARITY SWAPPING AND/OR POLARITY BALANCING FOR WAFER BOW CONTROL AND NONUNIFORMITY IMPROVEMENT" on Jan 10, 2025. With publication no. WO/2025/165540, the details related to the patent application was published on Aug 07, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHENG, Huifeng (4650 Cushing ParkwayFremont, California 94538), KANG, Hu (4650 Cushing ParkwayFremont, California 94538), WOMACK, Joseph Lindsey (4650 Cushing ...