INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH MULTI-COMPONENT CERAMIC COATING APPLIED TO BASEPLATE"

GENEVA, Oct. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/023943) for "ELECTROSTATIC CHUCK WITH MULTI-COMPONENT CERAMIC COATING APPLIED TO BASEPLATE" on Apr 09, 2025. With publication no. WO/2025/217325, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XU, Lin (4650 Cushing ParkwayFremont, California 94538), LIU, Lei (4650 Cushing ParkwayFremont, California 94538), DAUGHERTY, John (4650 Cushing ParkwayFremont, California 94538), WETZEL, David, Joseph ...