INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "EDGE RING FOR HIGH TEMPERATURE TOLERANCE IN SUBSTRATE PROCESSING SYSTEMS"

GENEVA, Oct. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/023580) for "EDGE RING FOR HIGH TEMPERATURE TOLERANCE IN SUBSTRATE PROCESSING SYSTEMS" on Apr 08, 2025. With publication no. WO/2025/217112, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAASANDORJ, Enkhjin (4650 Cushing ParkwayFremont, California 94538)

Abstract: An edge ring is configured to be arranged around a substrate support in a substrate processing chamber. The edge ring includes a...