INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DYNAMIC TEMPERATURE CONTROL OF ZONED SUBSTRATE SUPPORT IN SUBSTRATE PROCESSING SYSTEM"

GENEVA, March 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/040497) for "DYNAMIC TEMPERATURE CONTROL OF ZONED SUBSTRATE SUPPORT IN SUBSTRATE PROCESSING SYSTEM" on Aug 01, 2024. With publication no. WO/2025/049034, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MO, Chengyang (4650 Cushing ParkwayFremont, California 94538), SUNDARAM, Sairam (4650 Cushing ParkwayFremont, California 94538), CHANDRASEKHARAN, Ramesh (4650 Cushing ParkwayFremont, California...