GENEVA, Aug. 26 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/013197) for "DUAL ZONE HEATERS FOR METALLIC PEDESTALS" on Jan 27, 2025. With publication no. WO/2025/174574, the details related to the patent application was published on Aug 21, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SANKHE, Pratik (4650 Cushing ParkwayFremont, California 94538), BHALODIA, Jaykumar Atulbhai (4650 Cushing ParkwayFremont, California 94538)
Abstract:
A substrate support for processing a substrate includes a baseplate, a first heater, a...