INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DUAL BACKSIDE GAS SUPPLY SYSTEM"

GENEVA, Dec. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/030521) for "DUAL BACKSIDE GAS SUPPLY SYSTEM" on May 22, 2025. With publication no. WO/2025/250431, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LYU, Peng Fei (4650 Cushing ParkwayFremont, California 94538), SUN, Li Fei (4650 Cushing ParkwayFremont, California 94538), REN, Xin Nan (4650 Cushing ParkwayFremont, California 94538), ZHU, Jin (4650 Cushing ParkwayFremont, California 94538), REN,...