INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DRY DEVELOPMENT SIMULATION METHODS FOR PHOTORESIST FILMS"

GENEVA, Oct. 15 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/022344) for "DRY DEVELOPMENT SIMULATION METHODS FOR PHOTORESIST FILMS" on Mar 31, 2025. With publication no. WO/2025/212523, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHANG, Yichi (4650 Cushing Pkwy.Fremont, California 94538), MATHUR, Monica Sawkar (4650 Cushing Pkwy.Fremont, California 94538), ZHANG, Xing (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: Dry development models of a...