INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DOWNSTREAM EXHAUSTING OF GASES DURING MAINTENANCE OF SUBSTRATE PROCESSING CHAMBERS"

GENEVA, Dec. 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/034481) for "DOWNSTREAM EXHAUSTING OF GASES DURING MAINTENANCE OF SUBSTRATE PROCESSING CHAMBERS" on Jun 20, 2025. With publication no. WO/2025/264983, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): AKARTE, Rohit (4650 Cushing ParkwayFremont, California 94538), JAYARAMU, Vishwanath (4650 Cushing ParkwayFremont, California 94538), YALAMALLI, Ravindrakumar (4650 Cushing ParkwayFremont, Californi...