INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DIFFUSION BARRIERS TO REDUCE QUEUE-TIME EFFECTS IN EUV LITHOGRAPHY"

GENEVA, May 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/054806) for "DIFFUSION BARRIERS TO REDUCE QUEUE-TIME EFFECTS IN EUV LITHOGRAPHY" on Nov 06, 2024. With publication no. WO/2025/101667, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DEMUTH, Joshua James (4650 Cushing Pkwy.Fremont, California 94538), YU, Jengyi (4650 Cushing Pkwy.Fremont, California 94538), TAN, Samantha S.H. (4650 Cushing Pkwy.Fremont, California 94538), PETER, Daniel (4650 Cush...