INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DIELECTRIC ETCH WITH REDUCED DISTORTION"

GENEVA, Oct. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/022957) for "DIELECTRIC ETCH WITH REDUCED DISTORTION" on Apr 03, 2025. With publication no. WO/2025/216970, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): THIE, William (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), KIM, Taeseung (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), MACKIE, Neil Macaraeg (c/o Lam Researc...