INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DIELECTRIC ETCH USING UNSATURATED CARBON CONTAINING COMPONENTS"

GENEVA, Feb. 4 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/037426) for "DIELECTRIC ETCH USING UNSATURATED CARBON CONTAINING COMPONENTS" on Jul 10, 2024. With publication no. WO/2025/024134, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VEBER, Gregory Clinton (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), OH, Taeseok (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), OZEL, Tan...