INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DETERMINING LINE EDGE ROUGHNESS AND LINE WIDTH ROUGHNESS METRICS"

GENEVA, May 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/054431) for "DETERMINING LINE EDGE ROUGHNESS AND LINE WIDTH ROUGHNESS METRICS" on Nov 04, 2024. With publication no. WO/2025/101462, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Qing Peng (4650 Cushing Pkwy.Fremont, California 94538), ZHONG, Yujia (4650 Cushing Pkwy.Fremont, California 94538), DENG, Quan (4650 Cushing Pkwy.Fremont, California 94538), SUN, Li Fei (4650 Cushing Pkwy.Fremon...