INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DEPOSITION WITH MODIFICATION STEP FOR SPUTTERING AND/OR COMPOSITION MODIFICATION"

GENEVA, March 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/043729) for "DEPOSITION WITH MODIFICATION STEP FOR SPUTTERING AND/OR COMPOSITION MODIFICATION" on Aug 23, 2024. With publication no. WO/2025/049340, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHURCH, Jonathan (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples are disclosed that relate to chemical vapor deposition (CVD) with a plasma-based modification step. One example...