INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "DEGAS MODULE FOR PULSED LASER DEPOSITION"

GENEVA, Sept. 17 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/018219) for "DEGAS MODULE FOR PULSED LASER DEPOSITION" on Mar 03, 2025. With publication no. WO/2025/188670, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MAROHL, Dan (4650 Cushing ParkwayFremont, California 94538), SANGPLUNG, Saangrut (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples are disclosed that relate to treating a substrate in a degas module to remove water vap...