INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CYCLIC ETCHING BETWEEN DEPOSITION CYCLES"

GENEVA, June 19 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/058375) for "CYCLIC ETCHING BETWEEN DEPOSITION CYCLES" on Dec 04, 2024. With publication no. WO/2025/122557, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IMADE, Mamoru (4650 Cushing ParkwayFremont, California 94538), AGARWAL, Pulkit (4650 Cushing ParkwayFremont, California 94538), ANDERSON, Kierstyn Phyllis (4650 Cushing ParkwayFremont, California 94538)

Abstract: A method for filling a ...