INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CRYOGENIC CHUCK FOR NARROW ION ANGULAR SPREAD IN SUBSTRATE PROCESSING SYSTEMS"

GENEVA, Oct. 14 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/021506) for "CRYOGENIC CHUCK FOR NARROW ION ANGULAR SPREAD IN SUBSTRATE PROCESSING SYSTEMS" on Mar 26, 2025. With publication no. WO/2025/212333, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SHOEB, Juline (4650 Cushing ParkwayFremont, California 94538), PATERSON, Alexander Miller (4650 Cushing ParkwayFremont, California 94538)

Abstract: An example substrate processing system includes a pro...