INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "COOLANT FLOW CONTROL SYSTEM FOR SUBSTRATE SUPPORTS"

GENEVA, Dec. 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/032407) for "COOLANT FLOW CONTROL SYSTEM FOR SUBSTRATE SUPPORTS" on Jun 05, 2025. With publication no. WO/2025/264393, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MAROHL, Dan (4650 Cushing ParkwayFremont, California 94538), DAS, Saurish (4650 Cushing ParkwayFremont, California 94538), KALLANNAVAR, Atithya Umesh (4650 Cushing ParkwayFremont, California 94538), KRISHNAPPA, Sathisha (4650 Cus...