INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "COOLANT CHANNEL DESIGNS FOR SUBSTRATE SUPPORTS TO REMOVE LOCAL NONUNIFORMITIES"

GENEVA, Sept. 2 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/016223) for "COOLANT CHANNEL DESIGNS FOR SUBSTRATE SUPPORTS TO REMOVE LOCAL NONUNIFORMITIES" on Feb 17, 2025. With publication no. WO/2025/178846, the details related to the patent application was published on Aug 28, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PEREZ, Aris (4650 Cushing ParkwayFremont, California 94538), LIU, Sai (4650 Cushing ParkwayFremont, California 94538), EHRLICH, Darrell (4650 Cushing ParkwayFremont, California 94538), YU, Yixuan (4650...