INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CONTROL OF SPATIAL DENSITY OF PLASMA WITH PROCESS STATIONS BY RETURN PATH REACTANCE TUNING"

GENEVA, Oct. 14 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/021702) for "CONTROL OF SPATIAL DENSITY OF PLASMA WITH PROCESS STATIONS BY RETURN PATH REACTANCE TUNING" on Mar 27, 2025. With publication no. WO/2025/212356, the details related to the patent application was published on Oct 09, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SCHEINER, Brett Stanford (4650 Cushing Pkwy.Fremont, California 94538), YEE, Benjamin Tong (4650 Cushing Pkwy.Fremont, California 94538), SAKIYAMA, Yukinori (4650 Cushing Pkwy.Fremont, Califo...