INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "COMPOSITE WINDOW WITH LIQUID COOLING FOR INDUCTIVELY COUPLED PLASMA PROCESSING SYSTEM"

GENEVA, May 19 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/051192) for "COMPOSITE WINDOW WITH LIQUID COOLING FOR INDUCTIVELY COUPLED PLASMA PROCESSING SYSTEM" on Oct 14, 2024. With publication no. WO/2025/101320, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DREWERY, John (4650 Cushing ParkwayFremont, California 94538), ALBERTI, Andrea (4650 Cushing ParkwayFremont, California 94538), PATERSON, Alexander Miller (4650 Cushing ParkwayFremont, California...