GENEVA, May 19 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/054953) for "COAXIAL, MULTI-FEED GAS DELIVERY STEM" on Nov 07, 2024. With publication no. WO/2025/101773, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LEE, James Forest (4650 Cushing Pkwy.Fremont, California 94538), BOATRIGHT, Daniel (4650 Cushing Pkwy.Fremont, California 94538)
Abstract:
An apparatus for semiconductor processing including a stem body and interior flow paths. The stem body ...