INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "COATING SURFACES WITHIN A PUMPING PATH OF A PROCESSING TOOL"

GENEVA, Dec. 10 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/031156) for "COATING SURFACES WITHIN A PUMPING PATH OF A PROCESSING TOOL" on May 28, 2025. With publication no. WO/2025/250609, the details related to the patent application was published on Dec 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MACDONALD, Gordon Alex (4650 Cushing ParkwayFremont, California 94538), SPIES, Kurt Augustus (4650 Cushing ParkwayFremont, California 94538), MALIEKKAL, Vineet (4650 Cushing ParkwayFremont, California 94538), PUTHENKOVIL...