INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CIRCULATION OF NON-PFAS FLUIDS IN LIQUID AND SUPERCRITICAL FLUID STATES THROUGH SUBSTRATE PROCESSING SYSTEM COMPONENTS"

GENEVA, April 21 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/048261) for "CIRCULATION OF NON-PFAS FLUIDS IN LIQUID AND SUPERCRITICAL FLUID STATES THROUGH SUBSTRATE PROCESSING SYSTEM COMPONENTS" on Sep 25, 2024. With publication no. WO/2025/080412, the details related to the patent application was published on Apr 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FREEDMAN, Justin Palmer (4650 Cushing ParkwayFremont, California 94538), EHRLICH, Darrell (4650 Cushing ParkwayFremont, California 94538), FLYNN, Kevin (4650 Cu...