INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CHEMICAL VAPOR DEPOSITION-ENHANCED ATOMIC LAYER DEPOSITION"

GENEVA, April 1 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/046859) for "CHEMICAL VAPOR DEPOSITION-ENHANCED ATOMIC LAYER DEPOSITION" on Sep 16, 2024. With publication no. WO/2025/064337, the details related to the patent application was published on Mar 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHO, Hyunchol (4650 Cushing ParkwayFremont, California 94538), BHANDARI, Shiva Sharan (4650 Cushing ParkwayFremont, California 94538), AGARWAL, Pulkit (4650 Cushing ParkwayFremont, California 94538)

Abstract: Examples ...