INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CERAMIC TOP PLATE WITH AN ANNULAR PROJECTION TO PROTECT A SEAL RING AND A BONDING LAYER OF A SUBSTRATE SUPPORT FROM ION EROSION"

GENEVA, June 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/058088) for "CERAMIC TOP PLATE WITH AN ANNULAR PROJECTION TO PROTECT A SEAL RING AND A BONDING LAYER OF A SUBSTRATE SUPPORT FROM ION EROSION" on Dec 02, 2024. With publication no. WO/2025/122428, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BEHZIZ, Behnam (4650 Cushing ParkwayFremont, California 94538), YU, Yixuan (4650 Cushing ParkwayFremont, California 94538), SAMULON, Eric (4650 Cushing ...