INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CARBON FILM DEPOSITION WITH REDUCING TREATMENT AFTER SHAPING ETCH"

GENEVA, Jan. 7 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/035665) for "CARBON FILM DEPOSITION WITH REDUCING TREATMENT AFTER SHAPING ETCH" on Jun 27, 2025. With publication no. WO/2026/006710, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DODHIA, Aarsh Nilesh (4650 Cushing ParkwayFremont, California 94538), MACDONALD, Gordon Alex (4650 Cushing ParkwayFremont, California 94538), VAN SCHRAVENDIJK, Bart J. (4650 Cushing ParkwayFremont, California 94538)...