INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CARBON FILM DEPOSITION USING PLASMA POWER MODULATION"

GENEVA, Nov. 25 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/029296) for "CARBON FILM DEPOSITION USING PLASMA POWER MODULATION" on May 14, 2025. With publication no. WO/2025/240576, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DODHIA, Aarsh Nilesh (4650 Cushing ParkwayFremont, California 94538), SUBRAMANIAN, Ashwanth (4650 Cushing ParkwayFremont, California 94538), PUTHENKOVILAKAM, Ragesh (4650 Cushing ParkwayFremont, California 94538), REDDY, Kapu S...