INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "BOW CONTROL OF HIGH ASPECT RATIO FEATURES DURING CRYOGENIC ETCH"

GENEVA, June 25 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/059425) for "BOW CONTROL OF HIGH ASPECT RATIO FEATURES DURING CRYOGENIC ETCH" on Dec 10, 2024. With publication no. WO/2025/128603, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BELAU, Leonid (4650 Cushing Pkwy.Fremont, California 94538), HUDSON, Eric A. (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: Methods and apparatus for etching a feature in a substrate are provided. The subst...