INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "BLENDED AND VERTICAL COMPOSITION GRADIENT EUV RESISTS"

GENEVA, May 6 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/052528) for "BLENDED AND VERTICAL COMPOSITION GRADIENT EUV RESISTS" on Oct 23, 2024. With publication no. WO/2025/090582, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHANG, Guoyan (4650 Cushing Pkwy.Fremont, California 94538), WEIDMAN, Timothy William (4650 Cushing Pkwy.Fremont, California 94538), WU, Chenghao (4650 Cushing Pkwy.Fremont, California 94538), KENANE, Nizan (4650 Cushing Pkwy.Frem...