INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "BACKSIDE DEPOSITION OF ANTI-REFLECTIVE (AR) AND HIGH REFLECTIVE (HR) LAYER"

GENEVA, Aug. 5 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/011367) for "BACKSIDE DEPOSITION OF ANTI-REFLECTIVE (AR) AND HIGH REFLECTIVE (HR) LAYER" on Jan 13, 2025. With publication no. WO/2025/159931, the details related to the patent application was published on Jul 31, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HUANG, Yanhui (c/o Lam Research Corporation4650 Cushing Parkway M/S CA-1Fremont, California 94538), LIU, Shizhao (c/o Lam Research Corporation4650 Cushing Parkway M/S CA-1Fremont, California 94538), SHANKAR...