INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "AZIMUTHAL EDGE RING CONTROL TO IMPROVE RESIDUAL NON-UNIFORMITY NEAR SUBSTRATE EDGES"

GENEVA, June 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/056604) for "AZIMUTHAL EDGE RING CONTROL TO IMPROVE RESIDUAL NON-UNIFORMITY NEAR SUBSTRATE EDGES" on Nov 20, 2024. With publication no. WO/2025/122347, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KAMP, Tom A. (4650 Cushing ParkwayFremont, California 94538)

Abstract: A substrate processing system includes a substrate support, an edge ring arranged around the substrate support, a pluralit...