INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ATOMIC LAYER ETCHING USING PASSIVATION AND DIRECTIONAL PLASMA"

GENEVA, Feb. 18 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/040442) for "ATOMIC LAYER ETCHING USING PASSIVATION AND DIRECTIONAL PLASMA" on Jul 31, 2024. With publication no. WO/2025/034500, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YANG, Wenbing (4650 Cushing ParkwayFremont, California 94538), RAMNANI, Pankaj Ghanshyam (4650 Cushing ParkwayFremont, California 94538), LEE, Young Ah (4650 Cushing ParkwayFremont, California 94538), FAN, Yiwen (4650 ...