INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "APPARATUS AND SYSTEM FOR FLOW CONTROL AND TUNING IN SEMICONDUCTOR PROCESSING"

GENEVA, Aug. 26 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/015543) for "APPARATUS AND SYSTEM FOR FLOW CONTROL AND TUNING IN SEMICONDUCTOR PROCESSING" on Feb 12, 2025. With publication no. WO/2025/174847, the details related to the patent application was published on Aug 21, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JUDGE, Jon Garret (4650 Cushing Pkwy.Fremont, California 94538), BOATRIGHT, Daniel (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: A bypass plate for use in semiconductor processing tools. The b...