INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "AN IN-SITU METAL LINER FOR IMPROVED HIGH ASPECT RATIO ETCH WITH BOW CONTROL"

GENEVA, May 14 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2024/051339) for "AN IN-SITU METAL LINER FOR IMPROVED HIGH ASPECT RATIO ETCH WITH BOW CONTROL" on Oct 15, 2024. With publication no. WO/2025/096185, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Mingmei (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), OH, Youn-Jin (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), SING...