INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "AMPOULE CONTAINING SOLID PRECURSOR FOR ATOMIC LAYER DEPOSITION PROCESSES"

GENEVA, Sept. 17 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/017536) for "AMPOULE CONTAINING SOLID PRECURSOR FOR ATOMIC LAYER DEPOSITION PROCESSES" on Feb 27, 2025. With publication no. WO/2025/188535, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GANANY, Alon (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: An ampoule of a substrate processing system includes an enclosure for containing a solid precursor and a control valve arrangement inclu...