INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "ACTIVE DIVERT PRESSURE TUNING"

GENEVA, June 25 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/059599) for "ACTIVE DIVERT PRESSURE TUNING" on Dec 11, 2024. With publication no. WO/2025/128720, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRUENING, Rigel Martin (4650 Cushing Pkwy.Fremont, California 94538), WOLK, Andrew David (4650 Cushing Pkwy.Fremont, California 94538), GERBER, Kevin (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: An apparatus for semiconductor processing i...