INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "A FINITE ELEMENT SIMULATION METHOD TO PREDICT THE FILM THICKNESS PROFILE FROM ZONAL SHOPED"

GENEVA, March 25 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2024/045876) for "A FINITE ELEMENT SIMULATION METHOD TO PREDICT THE FILM THICKNESS PROFILE FROM ZONAL SHOPED" on Sep 09, 2024. With publication no. WO/2025/058994, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HUANG, Yanhui (4650 Cushing Pkwy.Fremont, California 94538), BEAUDETTE, Chad Adrien (4650 Cushing Pkwy.Fremont, California 94538)

Abstract: Methods, apparatuses, and computer program prod...