INTERNATIONAL PATENT: LAM RESEARCH AG, SILICON AUSTRIA LABS GMBH FILES APPLICATION FOR "METHOD AND APPARATUS FOR MEASURING THE TEMPERATURE OF A SEMICONDUCTOR WAFER"

GENEVA, July 1 -- LAM RESEARCH AG (SEZ-Strasse 19500 Villach), SILICON AUSTRIA LABS GMBH (Europastrasse 12A-9524 Villach) filed a patent application (PCT/EP2024/086634) for "METHOD AND APPARATUS FOR MEASURING THE TEMPERATURE OF A SEMICONDUCTOR WAFER" on Dec 16, 2024. With publication no. WO/2025/132253, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRIEN, Daniel (SEZ-Strasse 19500 Villach), LEITHOLD, Christoph (Europastrasse 12A-9524 Villach), ASHOURI SHOKRI, Younes (Europastrasse 12A-9524 Villach), AUBOCK, Gerald (Euro...